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    设备详细介绍

    高分辨率场发射扫描电镜

    High Resolution Field Emission Scanning Electron Microscopy

    发布时间:2013-01-25 | 【打印】 【关闭】

     

      型   号:NOVA NanoSEM 430

      功   能:

    • 导电和非导电样品的高分辨率形貌观察,并可背散射电子成像
      Morphological observation for conducting and insulating samples with high resolution, and imaging using back-scattered electrons
    • 配备Oxford X-Max 80能谱仪,可检测成分、探测成分分布
      Detection and mapping of elements in samples with the Oxford X-Max 80 energy dispersive spectrometer (EDS) equipped

      主要指标:

    • 分辨率(Resolution): 1.0 nm @ 15 kV;  1.6 nm @ 1.0 kV
    • 观察范围(Viewfield):100 mm ×100 mm
    • 样品台倾角(Tilting angles):-5° ~ + 70°
    • 配备能谱仪(EDS):超大面积电制冷硅飘逸探测器 (Si drift detector with 80 mm2 super ATW window electrically cooled )
    • 能谱分辨率(Energy resolution):≦129 eV(Mn, 40000 cps)

      技术特点:

    • 高分辨率
      High resolution
    • 非导电样品形貌观察
      Morphological observation of non-conducting materials
    • 形貌观察和成分分析可结合
      Combined analysis of morphology and element mapping

     
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